The cantilever stack comprises of piezo-resistive Boron doped poly silicon, encapsulated by layers of silicon dioxide. The thickness of the micro cantilever stack is 650 nm and its length is 200 µm. It can be used in chemical and biochemical sensing applications.
Structure & Principle:
- Diving board like structure.
- Deflects both upwards and downwards due to compressive and tensile stresses leading to strain in the whole structure.
- Piezo-Resistive structure enables measurement of strain in the form of change in resis-tance between two conducting points at the base of the cantilever.
- Therefore, the Piezo-Resistive MEMS Cantilever is capable of transducing a nano-mechanical motion into an electrical signal.