Micro Heater-NMH200

Micro-Heater-mounted-on-PCB

NanoSniff_Microheater-die

NHM200 is a Micro Heater with an integrated temperature sensor. It consists of two suspended and interdigitated platinum coils, viz. Heater and Sensor. The low thermal mass of the heater coil allows for high speed heating and cooling within a few milliseconds. Temperature is sensed by the sensor coil whose resistance increases with temperature in a known and repeatable way. It exhibits very high accuracy over a wide range of temperatures.

Structure:

  • Suspended Platinum structure on a silicon substrate.
  • Sandwiched between films of silicon dioxide and silicon nitride.
  • Acts like a hot plate due to resistive heating.
  • Comes with an Integrated temperature sensor.
  • Zinc Oxide nanowires are grown on the silicon membrane.They are absorb moisture and increase the sensing surface area.
  • The thickness of the micro heater is 1 μm
  • The width of the platinum coil structure is 10 μm

Application:

  • Gas Sensors/ Air Quality control
  • Temperature Sensing
  • Heating element in micro and nano-scale sensing experiments
  • Bio MEMS/ DNA Analysis
  • Micro-Solid Oxide Fuel Cells in portable power storage and delivery
  • Homeland security
  • Automotive Exhaust Gas sensors
  • Micro Propulsion systems

Operating Characteristics:

Resistance of Heater at 25°C
200Ω
Resistance of Sensor at 25°C
160Ω
TCR (a)
0.0026/ °C
Thermal Rise Time (25°C-500°C)
4ms
Thermal Fall Time (500°C-25°C)
6ms
Membrane Size
500pm x 500pm
Maximum Power Dissipation
245 mW
Contact Resistance
< 5Ω

Electrical Ratings:

Heater- Pulse Mode

DMax. Supply Voltage (Amplitude)
6V
Duty Cycle
50%

Heater-Continuous Mode

Max. Supply Voltage
3V

Sensor

Max Temperature Sensing Current
1 mA

Formula:

I= ((RT/ R25)-1)/ a

T : Temperature in °C

RT & R25 : Resistances at T°C & 25°C

a : Temperature Coefficient of Resistance